Nanocolumnar CdS thin films grown by glancing angle deposition from a sublimate vapor effusion source

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Nanospring pressure sensors grown by glancing angle deposition.

Arrays of Cr zigzag nanosprings and slanted nanorods, 15-55 nm and 40-80-nm-wide, respectively, were grown on SiO2/Si substrates by glancing angle deposition. The arrays exhibit a reversible change in resistivity upon loading and unloading, by 50% for nanosprings and 5% for nanorods, indicating their potential as pressure sensors. The resistivity drop is due to a compression of nanosprings (by ...

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ژورنال

عنوان ژورنال: Journal of Applied Research and Technology

سال: 2017

ISSN: 1665-6423

DOI: 10.1016/j.jart.2017.02.003